Resolution | 0.5/1/5/10um |
Accuracy | +3/+5/+10µm (20oC/68oF) |
Bench marks | The grating period : 20um optical linear Scale |
Grating system | The tansmissive and infrared optical measuring system, the infrared wave length is 800mm. |
Reading head sliding system | Vertical or 45o five precision bearing system |
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